OEM In situ mask temperature measurement system VTMS, Semiconductor Factory

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In situ mask temperature measurement system VTMS

The in-situ Mask Temperature Measurement System (VTMS) is used for temperature monitoring and verification during e-beam mask writing. Since electron beam writing on masks requires extremely high temperature stability over extended periods, the VTMS continuously collects temperature data to provide the necessary information for ensuring thermal stability of the mask system.

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Hefei Zhice Electronics Co., Ltd., established in 2003, is a high-tech enterprise and a provincial-level "specialized, specialized and innovative" enterprise. The company is located in the Science and Technology Industrial Park of the National High-tech Industrial Development Zone in Hefei City,