In situ mask temperature measurement system VTMS
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The in-situ Mask Temperature Measurement System (VTMS) is used for temperature monitoring and verification during e-beam mask writing. Since electron beam writing on masks requires extremely high temperature stability over extended periods, the VTMS continuously collects temperature data to provide the necessary information for ensuring thermal stability of the mask system.
The in-situ Mask Temperature Measurement System (VTMS) is used for temperature monitoring and verification during e-beam mask writing. Since electron beam writing on masks requires extremely high temperature stability over extended periods, the VTMS continuously collects temperature data to provide the necessary information for ensuring thermal stability of the mask system.
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