In Situ Wired Wafer Temperature Measurement

NTC Wafer In Situ Wired Wafer Temperature Measurement

NTC Wafer In Situ Wired Wafer Temperature Me asurement system provides high-precision and reliable wafer temperature measurement and monitoring methods to improve process equipment performance, quality and yield.

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Specifications

Name	Specifications
Nominal resistance	10kΩ,5KΩ@25℃
Temperature range (℃)	0-100℃
Measurement accuracy (mK)	Able to reach ±0.01℃，±0.001℃
Repetition accuracy（mK）	Able to reach ＜0.01℃，＜0.002℃
Wire	4-wire
Wafer size	4, 6, 8, and 12 inches
Number of temperature measurement points (pieces)	Selectable
Point distribution	Average distribution or according to user requirements
Thickness (mm)	0.725
Vacuum feedthrough	Polyimide flat cable, atmospheric to 10-7 Torr capable, length designated by customer.
Lead length L1	2、3、5、10（m), can be customized
Lead terminal	DB or aviation plug
Calibration	Provide ZHICE-ELEC self calibration certificate

Temperature acquisition Software

ZCDAQ TEMP accurately collects and analyzes temperature data of wafers, and can provide multi-point temperature measurement. The software visualizes temperature distribution and changes with charts and provides hardware and software embedded solutions.

High Precision Temperature Modules

Specifications

Name	Specifications
Temperature range (℃)	0-100℃
Measurement accuracy (mK)	Can reach ±0.01℃，±0.001℃
Repetition accuracy (mK)	Can reach ＜0.01℃，＜0.002℃
Measurement resolution (mK)	0.001℃，0.0001℃
Number of measurement channels (pieces)	8, 18, 32, 48, etc. selectable
Sampling frequency	1Hz
Excitation current (uA)	≤10
Operation/fault indicator light	Yes
Single channel independent control	Yes
Input	4-wire 10K Ω thermistor
Communication interface	LAN/RS485/USB
Communication protocol	Modbus RTU
Temperature probe interface	DB or aviation plug
Temperature collection and recording software	ZCDAQ Wafer， Collect, record, analyze, and heat map
Power supply	AC220V/50Hz

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Hefei Zhice Electronics Co., Ltd., established in 2003, is a high-tech enterprise and a provincial-level "specialized, specialized and innovative" enterprise. The company is located in the Science and Technology Industrial Park of the National High-tech Industrial Development Zone in Hefei City,