Thermal Validation
Home

In Situ Wired Wafer Temperature Measurement

RTD Wafer In Situ Wired Wafer Temperature Measurement

RTD Wafer In Situ Wired Wafer Temperature Measurement

Instrumented wafers are used in semiconductor processing equipment where it is critical to understand and control the temperature at the wafer surface.

  • Product Details

Specifications

Temperature measurement range: -40 ℃ to 250 ℃

Resistors: Thin film platinum

Resistance: nominal resistance at 0 ℃ is 1000Ω

Accuracy: ± 0.1 ℃

Temperature measurement points: 1-68

Sensor lead: customizable

Insulations available: polyimide coated copper leads

Temperature probe interface: DB37

Wafer material: silicon wafer, sapphire, silicon carbide, etc. (substrate shape and size can be customized)

Wafer size: 50mm, 100mm, 150mm, 200mm, 300mm

Vacuum feedthrough: polyimide flat cable, atmospheric to 10-7 Torr capable, length designated by customer.

 

Hot Tags :
leave a message
If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.

Related Products

RTD Wafer In Situ Wired Wafer Temperature Measurement
RTD Wafer In Situ Wired Wafer Temperature Measurement
Instrumented wafers are used in semiconductor processing equipment where it is critical to understand and control the temperature at the wafer surface.
NTC Wafer In Situ Wired Wafer Temperature Measurement
NTC Wafer In Situ Wired Wafer Temperature Measurement
NTC Wafer In Situ Wired Wafer Temperature Me asurement system provides high-precision and reliable wafer temperature measurement and monitoring methods to improve process equipment performance, quality and yield.
TC WAFER In Situ Wired Wafer Temperature Measurement
TC WAFER In Situ Wired Wafer Temperature Measurement
Instrumented wafers are used in semiconductor processing equipment where it is critical to understand and control the temperature at the wafer surface. TC Wafer In Situ Wired Temperature Measurement Systems are commonly used for applications such as rapid thermal processing (RTP), rapid thermal annealing (RTA), post exposure bake (PEB), chemical vapor deposition (CVD), physical vapor deposition (PVD), ION implantation, solar cells and many other heat-driven processes.
Subscribe our newsletter

Please Read On, Stay Posted, Subscribe, And We Welcome You To Tell Us What You Think.

submit
Hefei Zhice Electronics Co., Ltd., established in 2003, is a high-tech enterprise and a provincial-level "specialized, specialized and innovative" enterprise. The company is located in the Science and Technology Industrial Park of the National High-tech Industrial Development Zone in Hefei City,
Contact Us

Copyright @ 2024 Hefei Zhice Electronics Co., Ltd.. All Rights Reserved. Sitemap / Blog / XML / Privacy Policy Network Supported

leave a message

leave a message
If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.
submit

Home

Products

WhatsApp

contact