Vacuum Chamber Precision Temperature Testing System for Semiconductor Equipment(Vac.TEMP)
)
1. Precision NTC sensor;
2. Vacuum through flange;
3. Precision multi-channel thermometer;
4. Temperature acquisition and analysis software DAQ TEMP.
1. Precision NTC sensor;
2. Vacuum through flange;
3. Precision multi-channel thermometer;
4. Temperature acquisition and analysis software DAQ TEMP.
Technical Specification for Precision NTC Temperature Sensor
|
Name |
Specifications |
|
Standard resistance |
10000Ω@25℃ |
|
Absolute accuracy |
≤10、5、1mK |
|
Repeatability |
≤1mK@30min、1Hz |
|
Annual drift |
＜10、5、1mK |
|
Line system |
4 lines |
|
Probe packaging |
316L cylindrical packaging or specified, filled internally without leaving any air or leaking |
|
Lead material |
PTFE vacuum |
|
Response time |
≤1s |
|
Probe size |
≤φ2.0*10mm |
|
Connector |
DB |
|
Vacuum Feedthrough |
Flange |
|
Lead terminal |
Intelligent aviation plug |
|
Calibration |
Provide calibration report |
Technical Specification for Temperature Collector 618A/NTC
|
Name |
Specifications |
|
Temperature calibration range |
16-70℃ |
|
Absolute accuracy of measurement module |
≤ 10, 5 1mK@1Hz /Channel |
|
Annual drift of measurement module |
≤10、5、1mK |
|
Number of measurement channels |
4. 8, 16, 32, 120 options to choose from |
|
Sampling frequency |
Adjustable, maximum ≥ 10Hz/channel |
|
Excitation current |
≤10uA |
|
Operation/fault indicator light |
Yes |
|
Single channel independent control |
Yes |
|
Input |
4-wire NTC |
|
Communication interface |
LAN/RS485/USB |
|
Communication protocol |
Modbus RTU |
|
Data format |
Machine time - temperature value of corresponding channel |
|
Equipment time recording function |
There is an internal clock, and when the acquisition frequency is less than 1Hz, the time error is ≤ 0.1s |
|
Temperature probe interface |
Aviation plug |
|
Software |
Supporting DAQ data acquisition software |
|
Power supply |
AC220V adapter |
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